Semiconductor, Biopharma & Electronics Process & Environmental Control

The semiconductor, biopharmaceutical, and electronics manufacturing industries require a high degree of environmental stability, process control, and system reliability. From cleanroom environments, HVAC airflow, process equipment, exhaust systems, compressed dry air, and nitrogen supply to cooling water, process piping, and specialized isolation equipment, each system serves a different function while collectively affecting process environmental control, semiconductor process control, equipment operation, and production quality.

When facility or equipment management teams lack real-time and continuous measurement data, issues such as temperature and humidity deviations, changes in cleanroom differential pressure, insufficient airflow, rising gas dew point, abnormal supply pressure or flow, inadequate cooling water circulation, or reduced exhaust capacity may be difficult to identify at an early stage. By continuously measuring multiple parameters—including temperature, humidity, air velocity and airflow, differential pressure, dew point, pressure, liquid flow, liquid level, and air quality—measurement data can be collected from different equipment and process areas to support troubleshooting, maintenance planning, process environmental control, and system optimization.

eyc-tech provides a wide range of transmitters and signal instruments covering environmental conditions, airflow, and liquid piping systems. Measurement points can be established according to the requirements of semiconductor, biopharmaceutical, electronics manufacturing, and data center applications, while analog signals, Relay, or RS-485 communication can be integrated into existing control and monitoring systems. Continuous multi-point measurement from process environments to facility utility systems provides traceable data for equipment condition assessment, troubleshooting, and subsequent maintenance.

Exhaust and Waste Gas Treatment System Measurement

Semiconductor, electronics, and pharmaceutical processes may generate acidic or alkaline gases, process exhaust, or other waste gases that require centralized treatment. These gases are typically conveyed through exhaust ducts to scrubbers, activated carbon adsorption systems, or other waste gas treatment equipment. Insufficient exhaust velocity or airflow may affect localized exhaust performance at process equipment. Changes in the operating conditions of fans, ductwork, or downstream treatment equipment may also reduce actual exhaust capacity. Therefore, air velocity and airflow are important measurement parameters in process exhaust systems.

The FTM94/95 Industrial High Accuracy Thermal Mass Flow Transmitter, or the AFMP Average Flow Measuring Tube (Pitot tube) combined with the PHM330 Differential Pressure Transmitter or PHD330 Industrial Differential Pressure Transmitter, can be applied to waste gas exhaust, large exhaust ducts, and process exhaust environments containing mildly corrosive gases. These solutions continuously measure changes in exhaust air velocity and airflow, providing measurement data for the inspection and maintenance of fans, ductwork, and downstream treatment equipment when exhaust capacity declines or operating conditions change.

The FTM94/95 can directly measure air velocity up to 120 m/s, making it suitable for applications requiring continuous measurement of exhaust velocity and airflow variations. The AFMP uses multi-point averaging to obtain differential pressure information across the duct cross-section and works with a differential pressure transmitter to calculate air velocity and airflow. This helps reduce the influence of localized turbulence and uneven velocity distribution on single-point measurement. The two measurement approaches can be selected according to duct size, installation conditions, flow profile, and system requirements for long-term measurement in process exhaust and waste gas treatment systems.

Cleanroom and Process Equipment Environmental Measurement

Semiconductor photolithography, etching, deposition, chemical mechanical polishing, and other precision processes require highly stable temperature, humidity, differential pressure, and airflow conditions around process equipment. Even when the overall cleanroom remains within specified environmental conditions, the interior of process equipment or surrounding areas may still be affected by equipment heat generation, localized exhaust, cooling systems, and personnel activity, creating local microclimates that differ from the average room environment. Therefore, in addition to overall environmental control, measurement points should also be established around critical equipment.

The THS17-MD Temperature & Humidity Transmitter features a short probe design and can be installed inside equipment, around machinery, or in other space-constrained locations to continuously measure local temperature and humidity variations. For larger process areas, the THS30X Series Multifunction Temperature & Humidity Transmitter or THM80X Series Industrial Grade High Accuracy Temperature & Humidity Transmitter can be used to establish multi-point environmental measurement, allowing operators to compare temperature and humidity differences across equipment and zones.

Stable differential pressure relationships must also be maintained between clean areas to control airflow direction and reduce the possibility of external contaminants entering critical process zones. The PMM06-D Ultra-Low Differential Pressure Transmitter can be applied to cleanrooms, airlocks, and other environments with very small pressure differences. With a minimum display resolution of 0.05 Pa, it continuously measures changes in room differential pressure. When local low air velocity and airflow direction also need to be measured, the FDM06-L Bi-directional Low Air Flow Thermal Mass Transmitter, with a turndown ratio of 100:1, is suitable for low-velocity airflow and airflow direction measurement.

Cleanroom HVAC and Airflow System Measurement

Outdoor air handling units, air handling units, fan filter units, and supply/return air systems in cleanrooms work together to regulate temperature and humidity, supply clean air, and maintain room differential pressure. When airflow is insufficient, filter resistance increases, or air distribution changes, cleanroom air change rates and airflow conditions may deviate from their original settings and may also affect HVAC operating efficiency. Therefore, air velocity and airflow measurement are not only used for processing environmental control but can also provide data for energy-efficient environmental control and HVAC system optimization. In addition to room temperature, humidity, and differential pressure, air velocity and airflow in HVAC ducts and terminal supply air should also be continuously measured.

For cleanroom HVAC ducts, the AFMC HVAC Average Flow Measuring Tube can be combined with the PMM330 Differential Pressure Transmitter for air velocity measurement. The AFMC uses a multi-port averaging structure to obtain the average differential pressure across the duct cross-section, helping reduce the effect of turbulence on single-point measurement. It is suitable for major HVAC ducts including outdoor air, supply air, and return air ducts.

When HVAC systems operate at low air velocity or under variable air volume conditions, the differential pressure generated in the duct is also relatively small. The AFMC combined with the PMM330 supports air velocity measurement down to 1 m/s. If instantaneous and total airflow needs to be viewed directly on site, the DPM04 Flow Totalizer can be added to convert measurement results into locally readable airflow information and further interface with control or monitoring systems.

In fan filter units, laminar flow areas, and other low-airflow applications, the FDM06-L Bi-directional Low Air Flow Thermal Mass Transmitter can continuously measure low air velocity and identify airflow direction. If filter resistance and differential pressure across equipment need to be measured, a differential pressure transmitter with a suitable measuring range can be selected according to actual conditions. Differential pressure trends can then be used as a reference for filter cleaning and replacement.

Compressed Dry Air Dew Point Management

Compressed dry air is widely used in semiconductor and electronics manufacturing equipment for pneumatic control, purging, and process support, and it is also an important utility gas for certain biopharmaceutical equipment. In addition to supply pressure and flow, the moisture content of the gas is an important factor affecting supply quality. When dryer performance declines, filter elements become abnormal, or piping is affected by external moisture, the dew point may gradually rise, potentially leading to condensation or insufficient dryness in equipment and processes.

The THS88ECO Industrial Dew Point Transmitter or THS88MAX Industrial Dew Point Transmitter can be installed in compressed dry air pipelines. With a planned dew point measuring range of -80 ... +20 °Cdp, these transmitters continuously measure changes in supply gas dew point and provide measurement data for inspecting dryers, filters, and air supply systems.

Compressed dry air consumption can be measured using the FDM06-I Venturi Thermal Mass Flow Meter, providing continuous instantaneous flow and accumulated consumption data to help management teams understand actual air usage across different equipment, production lines, or areas. Its measuring range reaches 0 ... 4000 m³/h. By continuously recording dew point and flow data, both compressed air dryness and consumption trends can be evaluated, establishing a more comprehensive measurement basis for the air supply system.

Nitrogen Generation and High-Purity Gas Supply Measurement

Nitrogen is widely used in semiconductors, electronics manufacturing, and certain pharmaceutical processes for purging, protection, storage, and atmosphere control. Nitrogen can be generated on site using pressure swing adsorption systems and then distributed through supply piping to different process equipment. When supply pressure or flow is insufficient, gas supply stability at the equipment side may be affected. Therefore, flow and pressure variations should be continuously measured at nitrogen generation equipment and main supply lines.

The FTM06D Thermal Mass Flow Transmitter can be applied to nitrogen generation equipment and gas piping for flow measurement, with a measuring range of 0 ... 120 Nm/s, making it suitable for continuous measurement of nitrogen supply conditions. For applications requiring additional measurement of gas dryness, the THS88ECO Industrial Dew Point Transmitter or THS88MAX Industrial Dew Point Transmitter can be installed. Continuous flow and dew point measurement provides a more comprehensive basis for high-purity gas supply management.

Cooling Water and Process Piping Measurement

In semiconductor equipment, precision electronics, biopharmaceutical processes, and facility systems, cooling water and various process pipelines are responsible for equipment heat removal, cooling circulation, and fluid supply. Changes in water temperature, flow, piping pressure, or equipment differential pressure may indicate changing conditions in pumps, filters, heat exchangers, or piping circulation. Appropriate measurement points should therefore be established according to equipment type and pipe size.

The TP05 Temperature Transmitter can be installed on cooling water supply and return lines to measure inlet and outlet water temperature and temperature variations across a range of -40 ... +200 °C. For liquid piping applications that require simultaneous measurement of velocity and temperature, the FTC06 Temperature and Flow Transmitter uses thermal mass technology to measure both parameters simultaneously. Its measuring range is 0 ... 3 m/s for water and 0 ... 60 m/s for air, and it supports RS-485 communication. It is suitable for cooling water branches, precision equipment cooling, and other liquid circulation systems requiring long-term continuous measurement.

For larger cooling water main pipes, the FUM06 Ultrasonic Flowmeter (DN50 ... DN300) can be used for flow measurement, while smaller branch pipes can use the FUM03 Clamp-on Ultrasonic Flow Meter (DN8 ... DN50) to establish non-invasive measurement points. Selecting the appropriate ultrasonic flow measurement method according to pipe size can reduce installation requirements when adding measurement points to existing piping and enable comparison of flow distribution between main and branch lines.

Piping and pump pressure can be continuously measured using the P048 Universal Pressure Transmitter, while the P063 Differential Pressure Transmitter can be installed across heat exchangers, filters, or other equipment to observe changes in flow resistance. If the system includes tanks or reservoirs, the L051 Submersible Pressure Transmitter can also be used to measure liquid level and filling/draining conditions. Multi-point measurement of temperature, flow, pressure, differential pressure, and liquid level provides continuous and mutually comparable measurement data for cooling water and process piping systems.

AI Server and Data Center Cooling Measurement

As the power density of AI and high-performance computing equipment continues to increase, data centers are increasingly adopting hybrid cooling architectures combining air cooling and liquid cooling. Compared with conventional cooling water systems, data centers need not only to measure cooling system circulation conditions but also to understand the environment around server racks and verify that coolant is being delivered to racks and cold plates as intended.

In air-cooled server areas, the THS17-MD Temperature & Humidity Transmitter can be installed at the front and rear of server racks or around equipment to continuously measure temperature and humidity variations in intake and exhaust areas. Suitable differential pressure transmitters can also be used to measure differential pressure across racks or between zones. Comparing temperature, humidity, and differential pressure data provides measurement information for assessing rack airflow and changes in the surrounding environment.

In liquid-cooled server racks and critical branches, the FTC06 Temperature and Flow Transmitter can simultaneously measure coolant velocity and temperature. If instantaneous and accumulated flow values also need to be viewed on site, the DPM04 Flow Totalizer can be added. TP05 Temperature Transmitter may also be installed at rack coolant supply and return points as required. Comparing supply/return coolant temperatures with branch flow velocity data provides a measurement basis for inspecting rack, manifold, and cold plate circulation conditions.

Biopharmaceutical and Pharmaceutical Cleanroom Environmental Measurement

Biopharmaceutical and pharmaceutical processes also require stable clean environments, particularly in aseptic processing, pharmaceutical production, laboratories, and packaging areas. Environmental temperature, humidity, and differential pressure between spaces are important conditions for cleanroom environmental control. When temperature and humidity deviate from specified conditions or room differential pressure becomes insufficient, cleanroom conditions may change, making long-term and continuous environmental measurement necessary.

The THS30X Series Multifunction Temperature & Humidity Transmitter or THM80X Series Industrial Grade High Accuracy Temperature & Humidity Transmitter can be installed in cleanrooms and production areas to continuously measure temperature and humidity variations. The PMM06-D Ultra-Low Differential Pressure Transmitter can be used to measure very small differential pressures between different cleanroom classifications, airlocks, or corridors, helping confirm whether positive and negative pressure relationships remain within specified conditions. Continuous comparison of temperature, humidity, and differential pressure data provides a more complete understanding of cleanroom environmental changes.

Glove Box Environmental Measurement

Glove boxes are widely used in semiconductors, precision electronics, materials research, biopharmaceutical, and other processes that require isolation from the external environment. These systems typically use nitrogen or another inert gas to establish low-humidity, low-oxygen, or controlled atmospheres to reduce material oxidation, moisture contamination, and external environmental influence. Humidity, dew point, and differential pressure inside the enclosure are therefore important measurement parameters for evaluating changes in the isolated environment.

The THM50X Temperature & Humidity Transmitter is suitable for low-humidity environments and supports a temperature range of -40 °C ... +150 °C with accuracy up to ±0.1 °C / ±1 %RH, continuously measuring humidity changes inside the glove box. For applications with even lower moisture content or where gas dryness is evaluated by dew point, the THS88MAX Industrial Dew Point Transmitter can be used for continuous measurement. When the glove box needs to maintain a slight positive or negative pressure relative to the external environment, the PMM06-D Ultra-Low Differential Pressure Transmitter can be used to measure differential pressure between the enclosure and surrounding space. Together, humidity, dew point, and differential pressure data establish a continuous measurement basis for the glove box environment.

Biological Safety Cabinet Airflow and Differential Pressure Measurement

Biological safety cabinets use controlled intake, exhaust, and laminar airflow configurations to maintain a defined airflow pattern between the working area and the external environment, helping reduce the risk of cross-contamination between samples, operators, and the surroundings. Intake air velocity, airflow direction, and differential pressure between the cabinet and the external environment are therefore important measurement parameters.

The FDM06-L Bi-directional Low Air Flow Thermal Mass Transmitter can be used in low-velocity and laminar airflow environments to continuously measure intake or workspace air velocity and identify airflow direction. When combined with the PMM06-D Ultra-Low Differential Pressure Transmitter, it can also measure very small differential pressures between the cabinet interior and the surrounding environment. If differential pressure across filters also needs to be measured, a transmitter with an appropriate measuring range can be selected according to actual operating conditions. When air velocity, airflow direction, or differential pressure changes abnormally, continuous measurement data can provide a reference for equipment inspection and maintenance.

Local Display and Central Monitoring System Integration

Semiconductor, biopharmaceutical, and electronics manufacturing facilities typically contain many environmental and equipment measurement points. In addition to acquiring physical measurement values, local display, alarms, signal processing, and integration with backend systems are also important requirements for daily operation and maintenance. Suitable display and control instruments can therefore be selected according to different measurement signals and application requirements.

The SD05 Integrated Signal Indicator, DPM03 Multifunction Signal Display Monitor, and DPM04 Flow Totalizer can be used with transmitters according to different application requirements, allowing real-time measurement values to be viewed directly at equipment or piping locations. DPM03 supports alarms, signal processing, and retransmission. In addition to simultaneously displaying instantaneous and accumulated values, the DPM04 also supports alarms, signal processing, and retransmission, enabling further integration with control or monitoring systems and making equipment inspection and measurement verification easier for on-site maintenance personnel.

From Process Environments to System Equipment, eyc-tech Provides a Complete Measurement Architecture

Semiconductor, biopharmaceutical, and electronics manufacturing facilities include a wide range of systems and equipment, including cleanroom environments, HVAC and process exhaust, compressed dry air, nitrogen, cooling water, process piping, data centers, and specialized isolation equipment. When only a single measurement parameter is considered, identifying the actual source of an abnormal condition can be difficult. By establishing continuous multi-point measurement across different areas, measurement data from different systems can be compared to provide a more complete understanding of system changes.

eyc-tech transmitters support analog signals, Relay, or RS-485 communication, enabling measurement data from process equipment and facility systems to be integrated into existing BMS, SCADA, PLC, or data acquisition systems. This allows information from different measurement points to be centrally managed and continuously recorded, establishing a consistent and traceable data architecture to support process environmental control, semiconductor process control, energy-efficient environmental control, equipment inspection, anomaly comparison, system optimization, and preventive maintenance.