eYc Glove Box System in CVD of Semiconductor Industrial Process Manufacturing ─ eYc Dew Point Measuring Solution

Glove Box System in CVD of Semiconductor Industrial Process Manufacturing ─ eYc Dew Point Measuring Solution

《Glove Box System Organization》

The conditions of industry process

Benefits

• Upgrade 150% faster
• High accuracy and long-term stability
• Capable of temperature compensation and linear adjustment
• Industry sensor with non- cond. Bearable pressrure : 16 bar
• Analogue output : 0-1V/0-5V/1-5V/0-10V/2-10V/0-20mA/4-20mA
• Standard Modbus RTU protocol, RS-485 communication interface
• More size of connector for different environment to be easily installed
• High pressure, low humidity. Dew point measuring range : -80~+60 dp ℃
• Free programmable software which can adjust dew point range and provide more physical quantities, dew point, frostpoint, absolute humidity and so on to choose

THS88 V.S. THS88 Plus Reaction speed comparison

Comparison benchmark:
Test environment 1 : Tested in an alumina chamber
Test condition 2 : THS88 and THS88 Plus are both performed by 20 dp °C

>> eYc THS88 : 1 hour reach to -34.9 dp °C , 3 hours reach to steady state for measurement

>> eYc THS88 Plus (Upgrade version) :
1/2 hour reach to steady state for measurement, 1 hour reach to -66.9dp °C

Free Programmable software ─ Smart-UI

Product Information

eYc THS88 PLUS High Pressure Dew Point Transmitter >> 2018 Version Upgrade

Application

Related Products

Recommended Accessory 

Dew Point Probe Protect Case
Feature : anti-dust, moisture proof, and breathable
Material : PTFE filter ( for THS series )
Pores size: 50μm