eYc Glove Box System in CVD of Semiconductor Industrial Process Manufacturing ─ eYc Dew Point Measuring Solution

Glove Box System in CVD of Semiconductor Industrial Process Manufacturing ─ eYc Dew Point Measuring Solution

Glove Box System in CVD of Semiconductor Industrial Process Manufacturing ─ eYc Dew Point Measuring Solution


《Glove Box System Organization》

Glove Box System Organization


The conditions of industry process

The conditions of industry process


Benefits

  • Upgrade 150% faster
  • High accuracy and long-term stability
  • Capable of temperature compensation and linear adjustment
  • Industry sensor with non- cond. Bearable pressrure : 16 bar
  • Analogue output : 0-1V/0-5V/1-5V/0-10V/2-10V/0-20mA/4-20mA
  • Standard Modbus RTU protocol, RS-485 communication interface
  • More size of connector for different environment to be easily installed
  • High pressure, low humidity. Dew point measuring range : -80~+60 dp ℃
  • Free programmable software which can adjust dew point range and provide more physical quantities, dew point, frostpoint, absolute humidity and so on to choose


THS88 V.S. THS88 Plus Reaction speed comparison

Comparison benchmark:
Test environment 1 : Tested in an alumina chamber
Test condition 2 : THS88 and THS88 Plus are both performed by 20 dp °C

>> eYc THS88 : 1 hour reach to -34.9 dp °C , 3 hours reach to steady state for measurement
THS88 Reaction speed comparison


>> eYc THS88 Plus (Upgrade version) :
1/2 hour reach to steady state for measurement, 1 hour reach to -66.9dp °C

eYc THS88 Plus (Upgrade version)


Free Programmable software ─ Smart-UI

Free Programmable software ─ Smart-UI


Product Information

eYc THS88 PLUS High Pressure Dew Point Transmitter >> 2018 Version Upgrade

eYc THS88 PLUS High Pressure Dew Point Transmitter >> 2018 Version Upgrade


Application

Application

Chemical Research

Physics Research

OLED Research

Special Welding

R&D and Production of   Lithium Battery

Special Lamp Development and Production

Catalyst Research and Production

New Material Research and Production

The Pharmaceutical Industry

Nuclear Technology

Semiconductor CVD Manufacturing Process

Fine Chemical Industry

Biological Experiment and Research

Powder Metal

The Electronics Industry

 


Related Products

eYc THM86/87 Industrial Multifunction Dew Point Transmitter
eYc THS88 High Pressure Dew Point Transmitter
eYc THS90 Industrial High Pressure Dew Point Transmitter--> 2018 Pre-announcement,  click here to get more information now

Recommended Accessory 

Dew Point Probe Protect Case
Feature : anti-dust, moisture proof, and breathable
Material : PTFE filter ( for THS series )
Pores size: 50μm 

eYc Dew Point Probe Protect Case